An Overview of Piezoelectric Self-Sensing Actuation for Nanopositioning Applications: Electrical Circuits, Displacement, and Force Estimation
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: IEEE Transactions on Instrumentation and Measurement
سال: 2020
ISSN: 0018-9456,1557-9662
DOI: 10.1109/tim.2019.2950760